Methods of fabricating beol interlayer structures

ABSTRACT

Methods are provided for fabricating an interlayer structure useful in, for instance, providing BEOL interconnect for circuit structures. The method includes, for instance, providing an interlayer structure, including: providing an uncured insulating layer above a substrate structure; forming an energy removal film over the uncured insulated layer; forming at least one opening through the energy removal film and extending at least partially into the uncured insulating layer; and applying energy to cure the uncured insulating layer, establishing a cured insulating layer, and decomposing in part the energy removal film, establishing a reduced thickness, energy removal film over the cured insulating layer, the interlayer structure including the cured insulating layer, and the applying energy decreasing an aspect ratio(s) of the one opening(s). In one implementation, the uncured insulating layer includes porogens which also decompose partially during applying energy to further improve the aspect ratio(s).

FIELD OF THE INVENTION

The present invention relates to methods of facilitating fabricatingintegrated circuits, and more particularly, to methods for improvingmetal fill and metal resistance uniformity in interconnect layers of anintegrated circuit.

BACKGROUND OF THE INVENTION

As the density of semiconductor integrated circuits continues toincrease and the corresponding size of circuit elements decreases,fabrication yields and device performance issues continue to arise. Forinstance, as pitch between metal fill vias and/or trenches in back endof line (BEOL) interconnect structures continues to decrease, metal fillissues are arising or becoming more significant due, in part, to higherdesired aspect ratios of the structures. Further, as circuit sizedecreases, performance may be dominated by interconnectresistive-capacitive (RC) delay, for instance, between interconnectlayers. Accordingly, enhanced interconnect and enhanced interlayerstructures and fabrication methods are needed.

BRIEF SUMMARY

The shortcomings of the prior art are overcome, and additionaladvantages are provided through the provision, in one aspect, of amethod of fabricating an interlayer structure which includes: providingan uncured insulating layer above a substrate structure; forming anenergy removal film over the uncured insulating layer; forming at leastone opening through the energy removal film and extending at leastpartially into the uncured insulating layer; and applying energy to curethe uncured insulating layer, establishing a cured insulating layer, anddecomposing in part the energy removal film, establishing a reducedenergy removal film over the cured insulating layer, the interlayerstructure including the cured insulating layer, and the applying energydecreasing an aspect ratio(s) of the at least one opening.

Additional features and advantages are realized through the techniquesof the present invention. Other embodiments and aspects of the inventionare described in detail herein and are considered a part of the claimedinvention.

BRIEF DESCRIPTION OF THE SEVERAL VIEWS OF THE DRAWINGS

One or more aspects of the present invention are particularly pointedout and distinctly claimed as examples in the claims at the conclusionof the specification. The foregoing and other objects, features, andadvantages of the invention are apparent from the following detaileddescription taken in conjunction with the accompanying drawings inwhich:

FIG. 1A depicts a partial cross-sectional elevation view of oneembodiment of a structure, which includes a metal layer, and is obtainedduring a fabrication process, in accordance with one or more aspects ofthe present invention;

FIG. 1B depicts the structure of FIG. 1A after providing a protectivehard mask layer over the structure, in accordance with one or moreaspects of the present invention;

FIG. 1C depicts the structure of FIG. 1B after disposing an uncuredinsulating layer including porogens over the structure, in accordancewith one or more aspects of the present invention;

FIG. 1D depicts the structure of FIG. 1C after disposing an energyremoval film (ERF), and multiple protective layers over the structure,in accordance with one or more aspects of the present invention;

FIG. 1E depicts the structure of FIG. 1D after patterning and etchingthe structure, removing one of the protective layers, and forming one ormore openings extending through the energy removal film and into theuncured insulating layer, in accordance with one or more aspects of thepresent invention;

FIG. 1F depicts the structure of FIG. 1E after removal of any remainingprotective layer(s) over the structure, in accordance with one or moreaspects of the present invention;

FIG. 1G depicts the structure of FIG. 1F after applying energy to thestructure to cure the uncured insulating layer and partially decomposethe energy removal film to decrease the aspect ratio(s) of the one ormore openings within the structure, in accordance with one or moreaspects of the present invention;

FIG. 1H depicts the structure of FIG. 1G after over filling the one ormore openings with a conductive material, in accordance with one or moreaspects of the present invention;

FIG. 1I depicts the structure of FIG. 1H after planarizing theconductive material using the reduced energy removal film as an etchstop, in accordance with one or more aspects of the present invention;

FIG. 1J depicts the structure of FIG. 1I after provision of anothermetal layer over the structure, wherein the conductive structure(s)provides, in part, electrical connection between the another metal layerand the underlying metal layer, in accordance with one or more aspectsof the present invention; and

FIG. 2 depicts one embodiment of a process for fabricating an interlayerstructure, in accordance with one or more aspects of the presentinvention.

DETAILED DESCRIPTION

Aspects of the present invention and certain features, advantages, anddetails thereof, are explained more fully below with reference to thenon-limiting examples illustrated in the accompanying drawings.Descriptions of well-known materials, fabrication tools, processingtechniques, etc, are omitted so as not to unnecessarily obscure theinvention in detail. It should be understood, however, that the detaileddescription and the specific examples, while indicating aspects of theinvention, are given by way of illustration only, and are not by way oflimitation. Various substitutions, modifications, additions, and/orarrangements, within the spirit and/or scope of the underlying inventiveconcepts will be apparent to those skilled in the art from thisdisclosure.

In semiconductor technology, an integrated circuit may be formed on asemiconductor substrate according to a particular technology node, whichtypically indicates a minimum feature size. The minimum feature sizedictates spacing, for instance, for multilayer interconnections, such asmultilayer copper interconnections, including vertical interconnectionvias and horizontal interconnection metal lines, provided during backend of line (BEOL) processing of the integrated circuit. As technologynodes continue to reduce feature size, fabrication yields and deviceperformance issues are rising. For instance, reduced feature size mayresult in a pitch which requires vertical interconnects with high aspectratio(s), resulting in metal fill issues during fabrication. Further,resistive-capacitive (RC) interconnect delay becomes more significant asfeature size decreases. High RC delay may be, in part, the result ofreactive ion etching or wet-etch cleaning damage to the interlayerdielectric during interconnect formation, which may result in degradedperformance of the integrated circuit being fabricated. Further, metalresistance and metal non-uniformity may become an issue due to polishselectivity of, for instance, copper interconnect to the interlayerdielectric material, such as a low-k material or ultra low-k material.

Advantageously, provided herein are interlayer and interconnectfabrication processes which improve resistance characteristics bylimiting resistance non uniformity, and improve interconnectresistive-capacitive (RC) performance by decreasing etch andplanarization damage to the interlayer material. Advantageously, thefabrication processes disclosed herein also decrease aspect ratio (AR)of via openings and trench openings used in back end of lineinterconnect processing, which enhances the metal filling process asminimum feature size narrows, thereby improving yield and reducingdefects in the integrated circuit structures formed. The fabricationprocessing presented will improve chip package interaction (CPI), byreducing interconnect stress, improving reliability performance, and canbe applied to any technology node, including, for instance, the 28 nmtechnology node and below.

Generally stated, provided herein, in one aspect, is a method offabricating an interlayer structure, which includes: providing anuncured insulating layer above a substrate structure; forming an energyremoval film over the uncured energy layer; forming at least one openingthrough the energy removal film and extending at least partially intothe uncured insulating layer; and applying energy to cure the uncuredinsulating layer, establishing a cured insulating layer, and decomposingin part the energy removal film, establishing a reduced energy removalfilm over the cured insulating layer, the interlayer structure includingthe cured insulating layer and the applying energy decreasing an aspectratio(s) of the at least one opening.

In one example, the insulating layer, and in particular, the curedinsulating layer, has an effective dielectric constant of, for instance,2.7, or below. The uncured insulating layer, which may be a low-k orultra-low-k dielectric material, may be formed of porogens plus a matrixmaterial, with the porogens also decomposing at least in part with theapplying energy to cure the uncured insulating layer. The curedinsulating layer may have a reduced thickness compared with a thicknessof the uncured insulating layer prior to applying the energy, therebyfurther decreasing the aspect ratio(s) of the at least one opening. Inone implementation, the energy removal film decomposes to a greaterdegree than the uncured insulating film during the applying energy. As aspecific example, the porogens of the uncured insulating layer may be aC-based polymer material, and the matrix material may be a silicon-basedmaterial.

In a further embodiment, the energy removal film may include a C-basedpolymer material, and the applying energy may result in the reducedenergy removal film having a reduced thickness that is 50% or less of athickness of the energy removal film prior to the applying energy. Forinstance, the reduced thickness of the reduced energy removal film maybe 25% or less the thickness of the energy removal film prior to theapplying energy.

As one example, the energy removal film and the insulating layer may bedifferent materials. For instance, the energy removal film may include aC-based polymer material, but lack the matrix material of the insulatinglayer. Thus, the energy removal film thickness decreases to a greaterextent than the insulating layer thickness during the applying energy tocure the uncured insulating layer. The thickness of the insulating layerand the energy removal film decreasing during the applying energyadvantageously results in decreased aspect ratio(s) for the at least oneopening provided in the interlayer structure.

In general, forming the energy removal film may include forming theenergy removal film from at least one of a photonic decomposablematerial, a thermal decomposable material, an e-beam decomposablematerial, or a combination thereof. Applying energy to cure the uncuredinsulating layer and partially decompose the energy removal film mayinclude utilizing one or more of thermal energy, x-ray energy,ultraviolet light energy, or infrared light energy.

In one implementation, providing the interlayer structure may furtherinclude, after applying the energy, over filling the at least oneopening with a conductive material, and planarizing an exposed surfaceof the interlayer structure after the over filling of the at least oneopening with the conductive material. Advantageously, the reduced energyremoval film may be used an etch stop for the planarizing. In oneexample, the reduced energy removal film may be about 5 nanometers orless in thickness (for instance, have a thickness in the range of 2-3nanometers), and be removed by the planarizing of the exposed surface ofthe interlayer structure.

In another implementation, providing the interlayer structure mayinclude providing a conductive material within the at least one openingto form a conductive structure, and the substrate structure may includea metal layer disposed above a substrate of the substrate structure,with the conductive structure extending, at least in part, to the metallayer. Further, the method may include disposing another metal layerover the interlayer structure, where the conductive structurefacilitates electrical connection between the metal layer and theanother metal layer. By way of example, the substrate structure mayfurther include a device layer disposed below the metal layer, and theconductive structure may facilitate electrical connection between theanother metal layer and the device layer.

Reference is made below to the drawings, which are not drawn to scalefor ease of understanding, wherein the same reference numbers usedthroughout different figures designate the same or similar components.

FIG. 1A illustrates a partial cross-sectional elevation view of astructure 100 obtained during fabrication of one or more interlayerstructures, in accordance with one or more aspects of the presentinvention. In the example shown, structure 100 includes a substrate 102,which may be (in one example) a bulk semiconductor material such as abulk silicon wafer. As another example, substrate 102 may include anysilicon-containing substrate including, but not limited to, silicon(Si), single crystal silicon, polycrystalline Si, amorphous Si,silicon-on-nothing (SON), silicon-on-insulator (SOI), orsilicon-on-replacement insulator (SRI) substrates and the like, and maybe n-type or p-type doped. Substrate 102 might be, for instance,approximately 600-700 micrometers thick, as one example only.

During front-end of line (FEOL) processing, individual devices arecreated, for instance, in a device layer 104, such as, for example,metal-oxide-semiconductor field-effect transistors (MOSFETs) or FinFETs,as well as capacitors, resistors, and other semiconductor devices. Thesedevices may be formed using various techniques, and their formation mayinclude several steps of processing such as creating surface structures,isolating devices with shallow or deep trenches, forming n-type andp-type wells, providing gate structures, and fabricating source anddrain conductive contact structures. Through these techniques,individual, unconnected (or partially connected) semiconductor devicesmay be fabricated in device layer 104.

After FEOL processing, as well as middle-of-the-line (MOL) processing,BEOL processing is performed, including, for example, silicidation ofsource and drain regions, deposition of a pre-metal dielectric (PMD)layer, and formation of vias or trenches in the PMD layer. During BEOLprocessing, a layer of a conductive material such as metal layer 106(e.g., metal 1 layer), may be deposited and patterned into a network ofinterconnecting lines or wiring, for instance, to facilitate the desiredinterconnection of semiconductor devices in device layer 104 as requiredto implement an integrated circuit design. The deposition of metal layer106, followed by subsequent processing to pattern, etch, and filltrenches and vias with conductive structures, may be repeated duringBEOL processing such that several metal layers, for example, between sixand ten metal layers, are deposited and processed in a similar manner.Between each metal layer, interlayer structures may be formed to isolatesignals from the various metal layers and to support structuralintegrity of the integrated circuit structure, including the metallayers and the interconnecting conductive structures such as trenches orvias. As an example, the interlayer structures may include one or moreinterlayer dielectrics.

FIG. 1B illustrates structure 100 of FIG. 1A after providing aprotective hard mask layer 108 over metal layer 106, such as a layer ofnitrogen-doped and hydrogen-doped silicon carbide material, or N-Blok(also referred to as a nitride barrier for low-k), which typically has10% mol to about 25% mol of nitrogen dopant, and which may be depositedusing, for instance, chemical-vapor deposition (CVD) processing. By wayof example, protective hard mask layer 108 may be 5-25 nm thick.

FIG. 1C illustrates the structure of FIG. 1B after providing aninsulating layer 110 over the structure. Insulating layer 110 may be, inone embodiment, an uncured dielectric layer having porogens 111.Porogens 111 are particles that may be degraded, or removed, leavingpores, using, for example, a thermal, ultra-violet (UV), or other curingprocess such as discussed below. Porogens 111, which may be nanopores,may be roughly spherical in shape, or may have irregular shapes andsizes, and may or may not be uniformly dispersed within insulating layer110. In another embodiment, insulating layer 110 may include, forexample, a matrix-porogen system, wherein porogens, are dispersed in amatrix material. In one example, some porogens 111 may be in directcontact with one another, while in another example, porogens 111 may beuniformly distributed. Insulating layer 110 may be deposited from agaseous phase using CVD, such as, for example, plasma-enhanced CVD(PECVD), or from a liquid phase using a spin-on deposition process, andby way of example, may have a thickness in the range of 30-60nanometers. Further, porogens 111 may have a diameter or criticaldimension of approximately 1 to 3 nanometers. Porogens 111 may be, forexample, a terpinene material, such as a-terpinene (ATRP), or may be acyclodextrin material, such as b-cyclodextrin (BCD). In another example,porogens 111 may be any commercially available gas or liquidpore-forming material, including any C-based material such as Porogen A.The matrix of the porogen-matrix material may be or include asilicon-based material.

As illustrated in FIG. 1D, an energy removal film (ERF) 112 is providedover the structure as a hard mask, along with one or more protectivelayers, such as a metal hard mask layer 114, for instance, a titaniumnitride, tantalum, etc., layer, and a dielectric material hard masklayer 116, for instance, a TEOS, SiON, SiCN, etc., layer, or moregenerally, formed of any conventional dielectric material having thedesired etch-selectivity.

The energy removal film (ERF) 112 may be provided using an energyremoval material, which is a material decomposable upon being exposed toa proper energy, such as ultra-violet (UV), x-ray, infrared, visuallight, thermal energy, electron beam (e-beam), and/or other properenergy sources. For example, one energy removal material is decomposableto e-beam, with electron energy ranging between about 100 eV and about500K eV. The energy removal material may include a photonic decomposablematerial, a thermal decomposable material, or an e-beam decomposablematerial. In one implementation, ERF 112 includes an organic compound,for instance, a C-based material. Thus, in one implementation, ERF 112is a different material than uncured insulating layer 110. (Note thatalternatively, ERF 112 and uncured insulating layer 110 could be similardecomposable materials, with different thicknesses to the providedlayers.) In one implementation, ERF 112 includes porogens, and uncuredinsulating layer 110 includes porogens in a matrix material, with theresult being that ERF 112 decomposes to a greater degree when energy isapplied than uncured insulating layer 110. By way of example, ERF 112may have a thickness of 10-30 nm, and be formed by a suitable process,such as chemical-vapor deposition (CVD).

Metal hard mask layer 114 and dielectric hard mask layer 116 may beprovided using any conventional process. For instance, the depositionprocesses of metal hard mask layer 114 and dielectric hard mask layer116 may include low-temperature CVD, plasma-enhanced CVD (PECVD), oratomic layer deposition (ALD). As noted, in one specific example, metalhard mask layer includes a titanium nitride, tantalum, etc., layer, andthe dielectric hard mask layer is any conventional dielectric materialhaving the desired etch-selectivity, such as TEOS, silicon oxy-nitride(SiON), silicon carbon-nitride (SiCN), and the like.

Patterning of the structure of FIG. 1D may be accomplished using anysuitable lithography process. Following patterning, material removal maybe performed by, for example, any suitable etching process, such as ananisotropic dry etching process, for instance, reactive-ion-etching(RIE) in a C_(x)F_(y) gas. When an etchant that is selective to thematerial of protective layer 108 is used, etching will naturally bestopped at protective layer 108, protecting materials therebelow.Protective layer 108 may then be selectively removed, for instance,using a different etch chemistry, for example dry etching.

FIG. 1E illustrates the structure of FIG. 1D after one example ofpatterning and etching, which results in removal of dielectric hard masklayer 116 (see FIG. 1D), as well as respective portions of metal hardmask layer 114, energy removal film 112, and uncured insulating layer110 to form openings 120. By way of example, openings 120 may includeone or more trenches 119 and vias 121 extending into the interlayerstructure, for instance, into and/or through the uncured insulatinglayer 110 and the protective hard mask 108 to metal layer 106. Openings120 may further include one or more trenches 119 extending into theuncured insulating layer 110. Openings 120 may be filled with conductivestructures to, for example, facilitate interconnection, includingvertical interconnection between BEOL metal layers, of an integratedcircuit, as explained further below.

FIG. 1F depicts the structure of FIG. 1E after removal of the metal hardmask layer 114 (see FIG. 1E) using, for instance, a wet-clean process.As a result of the patterning, etching, and wet-clean processing, damagemay occur to the sidewalls of openings 120, for instance, resulting fromdepletion of carbon at or adjacent to the sidewalls of the openings.Advantageously, and as explained below, this damage is at leastpartially repaired by applying energy to the structure to concurrentlycure uncured insulating layer 110, establishing a cured insulating layer110′, and decompose (in part) energy removal film 112, establishing areduced energy removal film 112′ over cured insulating layer 110′, asillustrated in FIG. 1G. As depicted, reducing thickness of uncuredinsulating layer 110 to that of cured insulating layer 110′, andreducing thickness of energy removal layer 112 by decomposing to reducedenergy removal layer 112′, advantageously decreases aspect ratio(s) ofthe openings 120 formed within the structure, which improves subsequentmetal fill of the openings. In one implementation, the energy removalfilm 112 is decreased to a reduced energy removal film that isapproximately 5-50% of the original thickness of the energy removal filmbefore the energy is applied. In one example, where the ERF has astarting thickness of 10-30 nm, the energy applied may decrease ERFthickness to about 20% of the original ERF material thickness, forinstance, to a thickness of about 2-6 nm.

The energy applied to the structure to cure the uncured insulating layerand reduce the energy removal film may include ultra-violet (UV), x-ray,infrared, visual light, thermal energy, electron-beam (e-beam), and/orother proper energy sources. One exemplary energy source applied to ERF112 and uncured insulating layer 110 includes ultra-violet light. Theenergy applied may have a certain duration in combination with a certaintype of energy to achieve the desired partial removal of porogens fromthe ERF material and the uncured insulating layer. In one embodiment,thermal energy is implemented, with a temperature ranging between about100° C. and about 600° C., and/or a duration from about a 1 minute toabout 20 minute period. In another implementation, ultra-violet energyis implemented, with a temperature ranging between about 100° C. andabout 600° C., and/or a duration of about 1 minute to about 10 minuteperiod. In a further example, an electron-beam may be applied, with theelectron energy ranging between 100 electron-volts (eV) and 500 keV. Inanother example, depending upon the materials and thickness used,approximately two to three minutes of UV light could be sufficient toachieve the desired curing of interlayer structure 115.

The ERF, upon being exposed to the applied energy, is partially removed,resulting in a reduced ERF 112′, and the uncured insulating layer 110 iscured, resulting in a cured insulating layer 110′. Note that porogenswithin the uncured insulating layer also decompose with the applyingenergy, and the energy applied to the insulating layer facilitatesrepair of the sidewalls of openings 120 by adjusting, for instance,carbon composition at the sidewalls as a result of the energy applied tothe structure, breaking bonds within the insulating layer. For instance,by establishing a temperature of about 400° C., carbon within theinsulating layer can be freed to move towards the opening sidewalls andform silicon-carbon bonding at the sidewalls, and thereby rebuild thesidewall surfaces. This adjustment at the sidewalls of the openingsadvantageously provides improved sidewall surface composition for themetal fill process.

During the curing process, at least a percentage of the degradableporogens 111 of insulating layer 110 and ERF 112, may transition into agaseous phase and migrate or bubble out from the structure, therebyleaving the depicted structure. For example, gas formed from porogens111 in insulating layer 110 may migrate through ERF 112 to escape thestructure. Resultant pores 111′ may be filled either with air or anothergas, or may have a partial vacuum therein, depending on the processconditions used. Because the dielectric constant of air or a vacuum isapproximately one (1), the formation of pores 111′ also serves to reducethe effective dielectric constant of the resultant interlayer structure.In one example, the dielectric constant of interlayer structure may bebetween 2.5 and 2.7; while in another example, the dielectric constantof interlayer structure may be below 2.5. Therefore, interlayerstructure, which had an initial capacitance before the curing process,will have a final capacitance after curing that is lower than theinitial capacitance, and in one example may be 50% of the initialcapacitance. As is known in the art, the capacitance of, for example, aparallel plate capacitor is proportional to the dielectric constant.With the plates of the parallel capacitor being, in this case, adjacentmetal layers or levels of the integrated circuit.

FIG. 1H depicts the structure of FIG. 1G after providing metal fillwithin the openings and over-filling the structure. By way of example,the metal fill may be provided by barrier and seed deposition (BSD) andelectrochemical plating (ECP), as one example. In one example, theconductive structures 120 may include a liner(s) 122 deposited intoopenings 120. The liner refers generally to any film or layer which mayinclude part of the conductive structure, and include (for instance) oneor more conformally-deposited layers, which may include titanium (Ti),carbon-doped titanium, tungsten (W), a tungsten-nitride (WN),titanium-nitride (TiN), tantalum-nitride (TaN), titaniumaluminum-nitride (TiAlN), and the like. Liners 122 may be depositedusing ALD, CVD, or any other suitable process, and facilitate theformation of conductive structures 124 by partially filling theopenings. Because cured insulating layer 110′ has substantially smoothsidewalls at the openings 120 (FIG. 1G), there is reduced risk of linermaterial 122 migrating into the insulating layer, which could otherwisereduce performance and increase leakage of the integrated circuits.Conductive structures 124 formed within the openings 120 may extend, forinstance, through the insulating layer and the protective hard mask 108to metal layer 106.

As shown in FIG. 1I, chemical-mechanical polishing may be employed toplanarize the structure, with the reduced ERF 112′ acting as a CMPpolish stop layer for the process. This advantageously provides bettermetal resistance uniformity across the structure.

FIG. 1J illustrates the structure of FIG. 1I after another metal layer126 has been disposed over the interlayer structure and conductivestructures 124. As depicted, one or more conductive structures 124facilitate electrical connection between metal layer 126 and metal layer106, and in so doing, facilitates electrical connection between metallayer 126 and device layer 104. In an integrated circuit fabricationprocess, there could be, for instance, between six to ten metal layers,with additional interlayer structures formed between each adjacent metallayer. After forming metal layer 126, for example, another interlayerstructure could be formed above metal layer 126, using the processingsteps previously described herein to achieve a reduced capacitance forthose layers, used as described.

By way of summary, FIG. 2 illustrates an overview of one embodiment of aprocess of fabricating an interlayer structure, in accordance with oneor more aspects of the present invention. As illustrated, fabricatingthe interlayer structure 200 includes: providing an uncured insulatinglayer above a substrate structure, the uncured insulating layerincluding porogens 210; providing an energy removal film over theuncured insulating layer 220; forming one or more openings through theenergy removal film and extending into or through the uncured insulatinglayer 230; applying energy to cure the uncured insulating layer,establishing a cured insulating layer, and decomposing in part theenergy removal film, establishing a reduced energy removal film over thecured insulating layer, thus decreasing an aspect ratio(s) of theopening(s) 240; over-filling the opening with a conductive material 250;and planarizing an exposed surface of the interlayer structure using thereduced energy removal film as a polish stop layer 260.

The terminology used herein is for the purpose of describing particularembodiments only and is not intended to be limiting of the invention. Asused herein, the singular forms “a”, “an” and “the” are intended toinclude the plural forms as well, unless the context clearly indicatesotherwise. It will be further understood that the terms “comprise” (andany form of comprise, such as “comprises” and “comprising”), “have” (andany form of have, such as “has” and “having”), “include” (and any formof include, such as “includes” and “including”), and “contain” (and anyform contain, such as “contains” and “containing”) are open-endedlinking verbs. As a result, a method or device that “comprises”, “has”,“includes” or “contains” one or more steps or elements possesses thoseone or more steps or elements, but is not limited to possessing onlythose one or more steps or elements. Likewise, a step of a method or anelement of a device that “comprises”, “has”, “includes” or “contains”one or more features possesses those one or more features, but is notlimited to possessing only those one or more features. Furthermore, adevice or structure that is configured in a certain way is configured inat least that way, but may also be configured in ways that are notlisted.

The corresponding structures, materials, acts, and equivalents of allmeans or step plus function elements in the claims below, if any, areintended to include any structure, material, or act for performing thefunction in combination with other claimed elements as specificallyclaimed. The description of the present invention has been presented forpurposes of illustration and description, but is not intended to beexhaustive or limited to the invention in the form disclosed. Manymodifications and variations will be apparent to those of ordinary skillin the art without departing from the scope and spirit of the invention.The embodiment was chosen and described in order to best explain theprinciples of one or more aspects of the invention and the practicalapplication, and to enable others of ordinary skill in the art tounderstand one or more aspects of the invention for various embodimentswith various modifications as are suited to the particular usecontemplated.

What is claimed is:
 1. A method comprising: providing an interlayerstructure comprising: providing an uncured insulating layer above asubstrate structure; forming an energy removal film over the uncuredinsulating layer; forming at least one opening through the energyremoval film and extending at least partially into the uncuredinsulating layer; and applying energy to cure the uncured insulatinglayer, establishing a cured insulating layer, and decompose in part theenergy removal film, establishing a reduced energy removal film over thecured insulating layer, the interlayer structure comprising the curedinsulating layer and the applying energy decreasing an aspect ratio(s)of the at least one opening.
 2. The method of claim 1, wherein providingthe interlayer structure further comprises, after applying the energy,over filling the at least one opening with a conductive material.
 3. Themethod of claim 2, wherein providing the interlayer structure furthercomprises planarizing an exposed surface of the interlayer structureafter the over filling of the at least one opening with the conductivematerial.
 4. The method of claim 3, wherein providing the interlayerstructure further comprises using the reduced energy removal film as anetch stop for the planarizing.
 5. The method of claim 4, wherein thereduced energy removal film is 10 nanometers or less in thickness and isremoved by the planarizing of the exposed surface of the interlayerstructure.
 6. The method of claim 1, wherein providing the interlayerstructure further comprises providing a conductive material within theat least one opening to form a conductive structure, and the substratestructure comprises a metal layer disposed above a substrate of thesubstrate structure, the conductive structure extending, at least inpart, to the metal layer.
 7. The method of claim 6, further comprisingdisposing another metal layer over the interlayer structure, wherein theconductive structure facilitates electrical connection between the metallayer and the another metal layer.
 8. The method of claim 7, wherein thesubstrate structure further comprises a device layer disposed below themetal layer, and wherein the conductive structure facilitates electricalconnection between the another metal layer and the device layer.
 9. Themethod of claim 1, wherein the uncured insulating layer comprises one ofa low-k dielectric material or an ultra-low-k dielectric material withporogens.
 10. The method of claim 9, wherein the cured insulating layerhas an effective dielectric constant of 2.5 or less.
 11. The method ofclaim 9, wherein the uncured insulating layer comprises a porogen andmatrix material, and wherein porogens of the uncured insulating layerdecompose, at least partially, during the applying energy.
 12. Themethod of claim 11, wherein the porogens of the uncured insulating layercomprise a C-based polymer material, and the matrix material comprisesan Si-based material.
 13. The method of claim 9, wherein the curedinsulating layer has a reduced thickness compared with a thickness ofthe uncured insulating layer, further decreasing the aspect ratio(s) ofthe at least one opening.
 14. The method of claim 12, wherein the energyremoval film decomposes to a greater degree than the uncured insulatingfilm during the applying energy.
 15. The method of claim 1, wherein thecured insulating layer has a reduced thickness compared with a thicknessof the uncured insulating layer, further decreasing the aspect ratio(s)of the at least one opening.
 16. The method of claim 15, wherein theapplying energy reduces thickness of the energy removal film a greaterpercentage than the applying energy reduces thickness of the uncuredinsulating layer.
 17. The method of claim 1, wherein the applying energyresults in the reduced energy removal film having a reduced thicknessthat is less than 50% a thickness of the energy removal film prior tothe applying energy.
 18. The method of claim 1, wherein the energyremoval film comprises a C-based polymer material.
 19. The method ofclaim 1, wherein the forming the energy removal film comprises formingthe energy removal film from at least one of a photonic decomposablematerial, a thermal decomposable material, an e-beam decomposablematerial, or a combination thereof.
 20. The method of claim 1, whereinthe applying energy comprises utilizing one or more of thermal energy,x-ray energy, ultraviolet light energy or infrared light energy.